au.\*:("GILARDINI A")
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The radiofrequency breakdown in low pressure argonGILARDINI, A. L.Journal of physics. D, Applied physics (Print). 1999, Vol 32, Num 12, pp 1281-1286, issn 0022-3727Article
Defect generation and suppression in device processes using a shallow trench isolation schemePESCHIAROLI, D; BRAMBILLA, M; MICA, I et al.Proceedings - Electrochemical Society. 2003, pp 477-488, issn 0161-6374, isbn 1-56677-376-8, 12 p.Conference Paper
